Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu-Cu bonding
نویسندگان
چکیده
Abstract Surface activated bonding of Cu by gas cluster ion beam (GCIB) irradiation with acetic acid vapor was studied. GCIB realizes surface smoothing and reaction enhancement without severe damage. Therefore, it is promising for surface-activated (SAB). In this study, introduced during Ar-GCIB to assist removal oxides on surface. XPS results showed that Cu(OH)2 effectively removed adsorbed acid, there no residue adsorption. addition, roughness decreased because the preferential protrusion. Preliminary experiments increase Cu-Cu bond strength vapor.
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ژورنال
عنوان ژورنال: Japanese Journal of Applied Physics
سال: 2022
ISSN: ['0021-4922', '1347-4065']
DOI: https://doi.org/10.35848/1347-4065/ac5424